TY  - GEN
AU  - Quinten, Michael
TI  - A Practical Guide to Optical Metrology for Thin Films
SN  - 9783527411672
PY  - 2013///
CY  - Weinheim, Germany
PB  - Wiley-VCH Verlag
KW  - Optical Sensors
KW  - Basics and Applications
N1  - Includes Reference and Index
UR  - https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/9783527664344?download=true
ER  -