@book{5249,
	author = {Bechtold, Tamara},
	title = {System‐Level Modeling of MEMS /},
	publisher = {Wiley‐VCH Verlag GmbH,},
	year = {c 2013.},
	address = {Weinheim, Germany :},
	note = {Includes Index},
	url = {https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/9783527647132?download=true}
}