00780nac a2200229 a 4500 BD-DhGUBL 20260223115515.0 251012s2013 ge a|||| |||| 001 0 eng d 9783527319039 9783527647132 BD-DhGUBL BD-DhGUBL BD-DhGUBL 23 621.381 System‐Level Modeling of MEMS / Edited by Tamara Bechtold...[et al] Weinheim, Germany : Wiley‐VCH Verlag GmbH, c 2013. xxvii, 530 p. : ill. ; Includes Index Circuit design Microelectromechanical systems Bechtold, Tamara https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/9783527647132?download=true Click here to download ddc EBK 5249 5249