TY  - GEN
AU  - Bechtold, Tamara
TI  - System‐Level Modeling of MEMS
SN  - 9783527319039
U1  - 621.381 23
PY  - 2013///
CY  - Weinheim, Germany
PB  - Wiley‐VCH Verlag GmbH
KW  - Circuit design
KW  - Microelectromechanical systems
N1  - Includes Index
UR  - https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/9783527647132?download=true
ER  -