@book{5530,
	author = {Dufour, Isabelle},
	title = {Resonant MEMS :},
	publisher = {Wiley‐VCH Verlag GmbH & Co. },
	year = {c 2015.},
	series = {Advanced micro & nanosystems},
	address = {Germany :},
	url = {https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/9783527676330?download=true}
}