00944nac a2200253 a 4500 BD-DhGUBL 20251210100702.0 251210s2015 ge a b 001 0 eng 9783527335459 9783527676330 BD-DhGUBL BD-DhGUBL BD-DhGUBL 621.381 23 Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand...[et al.] Germany : Wiley‐VCH Verlag GmbH & Co. c 2015. xxv, 483 p. : ill. ; Advanced micro & nanosystems Includes bibliographical references and index. Microelectromechanical systems. Dufour, Isabelle editor. Heinrich, Stephen M. editor. Josse, Fabien editor. https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/9783527676330?download=true Click here to download ddc EBK 5530 5530