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020 _a9783527411672
020 _a9783527664344
040 _aBD-DhGUBL
_cBD-DhGUBL
_dBD-DhGUBL
100 _aQuinten, Michael
245 1 2 _aA Practical Guide to Optical Metrology for Thin Films /
_cMichael Quinten.
260 _aWeinheim, Germany :
_bWiley-VCH Verlag,
_cc 2013.
300 _axi, 211 p. :
_bill. ;
504 _aIncludes Reference and Index
650 _aOptical Sensors
_vBasics and Applications
856 _uhttps://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/9783527664344?download=true
_yClick here to download
942 _2ddc
_cEBK
999 _c5078
_d5078