000 00780nac a2200229 a 4500
003 BD-DhGUBL
005 20260223115515.0
008 251012s2013 ge a|||| |||| 001 0 eng d
020 _a9783527319039
020 _a9783527647132
040 _aBD-DhGUBL
_cBD-DhGUBL
_dBD-DhGUBL
082 _223
_a621.381
245 _aSystem‐Level Modeling of MEMS /
_cEdited by Tamara Bechtold...[et al]
260 _aWeinheim, Germany :
_bWiley‐VCH Verlag GmbH,
_cc 2013.
300 _axxvii, 530 p. :
_bill. ;
500 _aIncludes Index
650 _aCircuit design
650 _aMicroelectromechanical systems
700 _aBechtold, Tamara
856 _uhttps://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/9783527647132?download=true
_yClick here to download
942 _2ddc
_cEBK
999 _c5249
_d5249