System‐Level Modeling of MEMS /
System‐Level Modeling of MEMS /
Edited by Tamara Bechtold...[et al]
- Weinheim, Germany : Wiley‐VCH Verlag GmbH, c 2013.
- xxvii, 530 p. : ill. ;
Includes Index
9783527319039 9783527647132
Circuit design
Microelectromechanical systems
621.381
Includes Index
9783527319039 9783527647132
Circuit design
Microelectromechanical systems
621.381
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