Resonant MEMS : fundamentals, implementation and application /
Resonant MEMS : fundamentals, implementation and application /
edited by Oliver Brand...[et al.]
- Germany : Wiley‐VCH Verlag GmbH & Co. c 2015.
- xxv, 483 p. : ill. ;
- Advanced micro & nanosystems .
Includes bibliographical references and index.
9783527335459 9783527676330
Microelectromechanical systems.
621.381
Includes bibliographical references and index.
9783527335459 9783527676330
Microelectromechanical systems.
621.381
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