Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand...[et al.]
Material type:
TextSeries: Publication details: Germany : Wiley‐VCH Verlag GmbH & Co. c 2015.Description: xxv, 483 p. : illISBN: - 9783527335459
- 9783527676330
- 621.381 23
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Includes bibliographical references and index.
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